Inventor · disambiguated record
Steven E. Monahan
Also filed as: MONAHAN STEVEN E
3 granted patents·57 citations·filing 1986–1992
72Inventor score
Files withIBM3
Top patents by PatentIndex Score
3 records- 0171US5299393ASlurry containment device for polishing semiconductor wafersIBM·Filed 1992·Granted Apr 5, 1994·33 cites·8 claims
- 0268US4810322AAnode plate for a parallel-plate reactive ion etching reactorIBM·Filed 1986·Granted Mar 7, 1989·17 cites·12 claims
- 0330US5279926AMethod and apparatus for removing vapor from a pressurized sprayed liquid in the manufacture of semiconductor integrated circuitsIBM·Filed 1992·Granted Jan 18, 1994·7 cites·10 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →