Inventor · disambiguated record
Koyumi Sasa
Also filed as: SASA KOYUMI
1 granted patent·2 pending applications·0 citations·filing 2014–2024
9Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0158US2025087455A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0258US2025087454A1Etching method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0342US9150969B2Method of etching metal layerTOKYO ELECTRON LTD·Filed 2014·Granted Oct 6, 2015·0 cites·3 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →