Inventor · disambiguated record

Makoto Osuga

Also filed as: OSUGA MAKOTO

2 granted patents·40 citations·filing 1981–1997

62Inventor score

Technology areasH10P

Files withSHINETSU CHEMICAL CO1 SHINETSU HANDOTAI KK1

Top patents by PatentIndex Score

2 records

0167US4388140AApparatus for wet treatment of wafer materialsSHINETSU CHEMICAL CO·Filed 1981·Granted Jun 14, 1983·34 cites·1 claims
0232US6080641AMethod of manufacturing semiconductor waferSHINETSU HANDOTAI KK·Filed 1997·Granted Jun 27, 2000·6 cites·8 claims

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