Inventor · disambiguated record
Tijs Frans Teepen
Also filed as: TEEPEN TIJS FRANS
5 granted patents·1 pending application·35 citations·filing 2006–2020
76Inventor score
Top patents by PatentIndex Score
6 records- 0194US7868300B2Lithography system, sensor and measuring methodMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted Jan 11, 2011·30 cites·37 claims
- 0278USRE48046ELithography system, sensor and measuring methodASML NETHERLANDS BV·Filed 2014·Granted Jun 9, 2020·2 cites·57 claims
- 0372USRE49602ELithography system, sensor and measuring methodASML NETHERLANDS BV·Filed 2020·Granted Aug 8, 2023·0 cites·57 claims
- 0465USRE45206ELithography system, sensor and measuring methodMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Oct 28, 2014·1 cites·37 claims
- 0556US8690005B2Charged particle lithography apparatus and method of generating vacuum in a vacuum chamberBALTUSSEN SANDER·Filed 2010·Granted Apr 8, 2014·2 cites·51 claims
- 0634US2011042579A1Charged particle lithography apparatus and method of generating vacuum in a vacuum chamberMAPPER LITHOGRAPHY IP BV·Filed 2010·Application pending·0 cites
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