Inventor · disambiguated record

Chen-Yuan Hsia

Also filed as: HSIA CHEN-YUAN

3 granted patents·4 citations·filing 2005–2010

55Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG3

Top patents by PatentIndex Score

3 records

0174US7819980B2System and method for removing particles in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Oct 26, 2010·4 cites·19 claims
0248US8046860B2System and method for removing particles in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG·Filed 2010·Granted Nov 1, 2011·0 cites·20 claims
0343US7460251B2Dimension monitoring method and systemTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted Dec 2, 2008·0 cites·18 claims

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