Inventor · disambiguated record

Chan-An Pao

Also filed as: PAO CHAN-AN

1 granted patent·8 citations·filing 2007–2007

30Inventor score

Technology areasY02P

Files withIND TECH RES INST1

Top patents by PatentIndex Score

1 record

0174US7640070B2Real-time fault detection and classification system in use with a semiconductor fabrication processIND TECH RES INST·Filed 2007·Granted Dec 29, 2009·8 cites·9 claims

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