Inventor · disambiguated record
Hedser Van Brug
Also filed as: VAN BRUG HEDSER
13 granted patents·39 citations·filing 2002–2021
87Inventor score
Top patents by PatentIndex Score
13 records- 0186US7522263B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·14 cites·20 claims
- 0281US7768627B2Illumination of a patterning device based on interference for use in a maskless lithography systemASML NETHERLANDS BV·Filed 2007·Granted Aug 3, 2010·6 cites·15 claims
- 0372US7697128B2Method of imaging radiation from an object on a detection device and an inspection device for inspecting an objectASML NETHERLANDS BV·Filed 2007·Granted Apr 13, 2010·8 cites·19 claims
- 0467US8064038B2Inspection apparatus, lithographic system provided with the inspection apparatus and a method for inspecting a sampleBROUWER EGBERT ANNE MARTIJN·Filed 2006·Granted Nov 22, 2011·3 cites·31 claims
- 0557US7121922B2Method and apparatus for polishing a workpiece surfaceTNO·Filed 2002·Granted Oct 17, 2006·6 cites·22 claims
- 0649US12209958B2Interferometric gas sensorTNO·Filed 2021·Granted Jan 28, 2025·0 cites·8 claims
- 0749US11143498B2Interferometer system and use thereofTNO·Filed 2017·Granted Oct 12, 2021·0 cites·35 claims
- 0846US11774734B2Focal in-field pointing telescope systemTNO·Filed 2019·Granted Oct 3, 2023·0 cites·15 claims
- 0943US11067441B2Correction of curved projection of a spectrometer slit lineTNO·Filed 2018·Granted Jul 20, 2021·0 cites·20 claims
- 1041US10473526B2Spatially resolved gas detectionTNO·Filed 2015·Granted Nov 12, 2019·0 cites·8 claims
- 1139US7471398B2Method for measuring contour variationsTNO·Filed 2003·Granted Dec 30, 2008·2 cites·20 claims
- 1237US10578545B2Spatially resolved aerosol detectionTNO·Filed 2016·Granted Mar 3, 2020·0 cites·5 claims
- 1333US10508951B2High resolution broadband monolithic spectrometer and methodTNO·Filed 2017·Granted Dec 17, 2019·0 cites·14 claims
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