Inventor · disambiguated record

Petros Miltiades Kopalidis

Also filed as: KOPALIDIS PETROS MILTIADES

1 granted patent·6 citations·filing 2019–2019

28Inventor score

Technology areasH10P

Files withAXCELIS TECH INC1

Top patents by PatentIndex Score

1 record

0184US10903097B2In-situ wafer temperature measurement and controlAXCELIS TECH INC·Filed 2019·Granted Jan 26, 2021·6 cites·25 claims

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Petros Miltiades Kopalidis — Patent Inventor | PatentIndex