Inventor · disambiguated record
Koenraad Stephan Silvester Salden
Also filed as: SALDEN KOENRAAD S S · SALDEN KOENRAAD STEPHAN SILVES
1 granted patent·1 pending application·10 citations·filing 2004–2004
33Inventor score
Files withASML NETHERLANDS BV2
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2 records- 0168US7239368B2Using unflatness information of the substrate table or mask table for decreasing overlayASML NETHERLANDS BV·Filed 2004·Granted Jul 3, 2007·10 cites·13 claims
- 0230US2005269934A1Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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