Inventor · disambiguated record

Tutomu Takeuchi

Also filed as: TAKEUCHI TUTOMU

1 granted patent·64 citations·filing 1996–1996

50Inventor score

Technology areasH10P

Files withDAINIPPON SCREEN MFG1

Top patents by PatentIndex Score

1 record

0176US5826601ATreating liquid replacing method, substrate treating method and substrate treating apparatusDAINIPPON SCREEN MFG·Filed 1996·Granted Oct 27, 1998·64 cites·12 claims

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