Inventor · disambiguated record
Yücel Kök
Also filed as: KOEK YUECEL · KÖK YÜCEL
3 granted patents·30 citations·filing 2006–2010
69Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV1JACOBS JOHANNES HENRICUS WILHELMUS1JANSSEN FRANCISCUS JOHANNES JOSEPH1
Top patents by PatentIndex Score
3 records- 0192US7751027B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 6, 2010·18 cites·65 claims
- 0287US9268236B2Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holderJACOBS JOHANNES HENRICUS WILHELMUS·Filed 2010·Granted Feb 23, 2016·5 cites·27 claims
- 0379US8451423B2Lithographic apparatus and methodJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2009·Granted May 28, 2013·7 cites·30 claims
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