Inventor · disambiguated record
Tatusya Hayashi
Also filed as: HAYASHI TATUSYA
2 granted patents·4 citations·filing 2017–2020
54Inventor score
Technology areasB82Y
Files withCANON KK2
Top patents by PatentIndex Score
2 records- 0190US11249394B2Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methodsCANON KK·Filed 2020·Granted Feb 15, 2022·2 cites·18 claims
- 0283US10663858B2Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methodsCANON KK·Filed 2017·Granted May 26, 2020·2 cites·10 claims
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