Inventor · disambiguated record
Fumihiko Uchida
Also filed as: UCHIDA FUMIHIKO
16 granted patents·1 pending application·802 citations·filing 1981–2009
96Inventor score
Top patents by PatentIndex Score
17 records- 0196US5820679AFabrication system and method having inter-apparatus transporterHITACHI LTD·Filed 1996·Granted Oct 13, 1998·144 cites·1 claims
- 0294US6099598AFabrication system and fabrication methodHITACHI LTD·Filed 1998·Granted Aug 8, 2000·99 cites·9 claims
- 0392US5416331ASurface atom fabrication method and apparatusHITACHI LTD·Filed 1992·Granted May 16, 1995·69 cites·36 claims
- 0491US7062344B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2003·Granted Jun 13, 2006·32 cites·12 claims
- 0590US5981399AMethod and apparatus for fabricating semiconductor devicesHITACHI LTD·Filed 1995·Granted Nov 9, 1999·114 cites·53 claims
- 0689US5858863AFabrication system and method having inter-apparatus transporterHITACHI LTD·Filed 1996·Granted Jan 12, 1999·63 cites·18 claims
- 0788US7392106B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2005·Granted Jun 24, 2008·8 cites·8 claims
- 0886US7603194B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2008·Granted Oct 13, 2009·6 cites·3 claims
- 0986US7310563B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2005·Granted Dec 18, 2007·6 cites·6 claims
- 1086US5628828AProcessing method and equipment for processing a semiconductor device having holder/carrier with flattened surfaceHITACHI LTD·Filed 1995·Granted May 13, 1997·82 cites·17 claims
- 1182US5562800AWafer transport methodHITACHI LTD·Filed 1994·Granted Oct 8, 1996·69 cites·21 claims
- 1280US5411430AScanning optical device and method for making a hybrid scanning lens used thereforHITACHI LTD·Filed 1992·Granted May 2, 1995·31 cites·10 claims
- 1374US5689494ASurface atom fabrication method and apparatusHITACHI LTD·Filed 1995·Granted Nov 18, 1997·22 cites·20 claims
- 1468US4380917ATube-bending machineHITACHI LTD·Filed 1981·Granted Apr 26, 1983·17 cites·9 claims
- 1565US5601686AWafer transport methodHITACHI LTD·Filed 1996·Granted Feb 11, 1997·26 cites·22 claims
- 1661US2010131093A1Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2009·Application pending·0 cites
- 1754US4739161AFine displacement transducer employing plural optical fibersHITACHI LTD·Filed 1986·Granted Apr 19, 1988·14 cites·7 claims
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