Inventor · disambiguated record
Yoshio Kawamura
Also filed as: KAWAMURA YOSHIO
51 granted patents·2 pending applications·4,537 citations·filing 1976–2009
99Inventor score
Files withHITACHI LTD39RENESAS TECH CORP6AGENCY IND SCIENCE TECHN2DENSO CORP2KAWASAKI HEAVY IND LTD2
Top patents by PatentIndex Score
53 records- 0199US5609511APolishing methodHITACHI LTD·Filed 1995·Granted Mar 11, 1997·413 cites·13 claims
- 0298US6077027ASemiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor deviceHITACHI LTD·Filed 1999·Granted Jun 20, 2000·418 cites·17 claims
- 0397US4894343AChamber plate for use in cell fusion and a process for production thereofHITACHI LTD·Filed 1987·Granted Jan 16, 1990·211 cites·5 claims
- 0497US4480910APattern forming apparatusHITACHI LTD·Filed 1982·Granted Nov 6, 1984·1.5k cites·15 claims
- 0596US5820679AFabrication system and method having inter-apparatus transporterHITACHI LTD·Filed 1996·Granted Oct 13, 1998·144 cites·1 claims
- 0696US5380396AValve and semiconductor fabricating equipment using the sameHITACHI LTD·Filed 1993·Granted Jan 10, 1995·164 cites·19 claims
- 0796US5183744ACell handling method for cell fusion processorHITACHI LTD·Filed 1989·Granted Feb 2, 1993·98 cites·3 claims
- 0895US4895805ACell manipulating apparatusHITACHI LTD·Filed 1988·Granted Jan 23, 1990·104 cites·10 claims
- 0995US4750364AAngular velocity and acceleration sensorHITACHI LTD·Filed 1986·Granted Jun 14, 1988·121 cites·8 claims
- 1094US6099598AFabrication system and fabrication methodHITACHI LTD·Filed 1998·Granted Aug 8, 2000·99 cites·9 claims
- 1194US4136756ASuction air muffler for a motorcycleKAWASAKI HEAVY IND LTD·Filed 1977·Granted Jan 30, 1979·62 cites·4 claims
- 1291US7062344B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2003·Granted Jun 13, 2006·32 cites·12 claims
- 1391US4057347AOptical exposure apparatusHITACHI LTD·Filed 1976·Granted Nov 8, 1977·56 cites·5 claims
- 1490US5981399AMethod and apparatus for fabricating semiconductor devicesHITACHI LTD·Filed 1995·Granted Nov 9, 1999·114 cites·53 claims
- 1590US4441206APattern detecting apparatusHITACHI LTD·Filed 1981·Granted Apr 3, 1984·79 cites·3 claims
- 1689US5858863AFabrication system and method having inter-apparatus transporterHITACHI LTD·Filed 1996·Granted Jan 12, 1999·63 cites·18 claims
- 1788US7392106B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2005·Granted Jun 24, 2008·8 cites·8 claims
- 1888US6723144B2Semiconductor device fabricating methodHITACHI LTD·Filed 2002·Granted Apr 20, 2004·38 cites·16 claims
- 1988US6091219AStructure of robot control systemDENSO CORP·Filed 1998·Granted Jul 18, 2000·155 cites·3 claims
- 2086US7603194B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2008·Granted Oct 13, 2009·6 cites·3 claims
- 2186US7310563B2Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2005·Granted Dec 18, 2007·6 cites·6 claims
- 2286US5628828AProcessing method and equipment for processing a semiconductor device having holder/carrier with flattened surfaceHITACHI LTD·Filed 1995·Granted May 13, 1997·82 cites·17 claims
- 2386US5284179AValve and semiconductor fabricating equipment using the sameHITACHI LTD·Filed 1992·Granted Feb 8, 1994·47 cites·11 claims
- 2485US4798470APattern printing method and apparatusHITACHI LTD·Filed 1986·Granted Jan 17, 1989·37 cites·9 claims
- 2583US4820928ALithography apparatusHITACHI LTD·Filed 1987·Granted Apr 11, 1989·33 cites·6 claims
- 2682US5562800AWafer transport methodHITACHI LTD·Filed 1994·Granted Oct 8, 1996·69 cites·21 claims
- 2782US4614432APattern detectorHITACHI LTD·Filed 1983·Granted Sep 30, 1986·32 cites·16 claims
- 2877US6663468B2Method for polishing surface of semiconductor device substrateHITACHI LTD·Filed 2001·Granted Dec 16, 2003·18 cites·19 claims
- 2973US4504726APattern generatorHITACHI LTD·Filed 1981·Granted Mar 12, 1985·35 cites·5 claims
- 3069US6565424B2Method and apparatus for planarizing semiconductor deviceHITACHI LTD·Filed 2001·Granted May 20, 2003·13 cites·2 claims
- 3168US5736824AMotor control apparatusDENSO CORP·Filed 1996·Granted Apr 7, 1998·38 cites·5 claims
- 3268US5548454AInformation recording disk, its production method and recording apparatusHITACHI LTD·Filed 1990·Granted Aug 20, 1996·18 cites·2 claims
- 3365US5601686AWafer transport methodHITACHI LTD·Filed 1996·Granted Feb 11, 1997·26 cites·22 claims
- 3462US6777337B2Planarizing method of semiconductor wafer and apparatus thereofRENESAS TECH CORP·Filed 2001·Granted Aug 17, 2004·8 cites·22 claims
- 3561US2010131093A1Fabrication system and fabrication methodRENESAS TECH CORP·Filed 2009·Application pending·0 cites
- 3656US6734103B2Method of polishing a semiconductor deviceHITACHI LTD·Filed 2002·Granted May 11, 2004·5 cites·14 claims
- 3756US6589871B2Processing method, measuring method and producing method of semiconductor devicesHITACHI LTD·Filed 2001·Granted Jul 8, 2003·5 cites·6 claims
- 3854US5308757ABiological cell treatment method and apparatusHITACHI LTD·Filed 1991·Granted May 3, 1994·22 cites·42 claims
- 3954US4153341AAutomatic focusing apparatusHITACHI LTD·Filed 1977·Granted May 8, 1979·12 cites·25 claims
- 4053US5971701ASemiconductor manufacturing apparatus for transferring articles with a bearing-less joint and method for manufacturing semiconductor deviceHITACHI LTD·Filed 1997·Granted Oct 26, 1999·15 cites·7 claims
- 4151US6524961B1Semiconductor device fabricating methodHITACHI LTD·Filed 1999·Granted Feb 25, 2003·14 cites·35 claims
- 4251US5154814ACell handling apparatusHITACHI LTD·Filed 1988·Granted Oct 13, 1992·6 cites·8 claims
- 4347US4531907AFluidized bed combustorAGENCY IND SCIENCE TECHN·Filed 1984·Granted Jul 30, 1985·9 cites·14 claims
- 4447US4477183AAutomatic focusing apparatusHITACHI LTD·Filed 1982·Granted Oct 16, 1984·8 cites·7 claims
- 4546US4419112AAir cleanerKAWASAKI HEAVY IND LTD·Filed 1982·Granted Dec 6, 1983·10 cites·1 claims
- 4643US4584766AApparatus for connection of multicore cableHIROSE ELECTRIC CO LTD·Filed 1983·Granted Apr 29, 1986·11 cites·3 claims
- 4741US4045141APhotoelectric microscopeHITACHI LTD·Filed 1976·Granted Aug 30, 1977·5 cites·12 claims
- 4841US4005977AGas circulating combustion meansAGENCY IND SCIENCE TECHN·Filed 1976·Granted Feb 1, 1977·6 cites·1 claims
- 4941US2004048554A1Method for polishing surface of semiconductor device substrateHITACHI LTD·Filed 2003·Application pending·0 cites
- 5040US6612912B2Method for fabricating semiconductor device and processing apparatus for processing semiconductor deviceHITACHI LTD·Filed 1999·Granted Sep 2, 2003·8 cites·33 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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