Inventor · disambiguated record

István Endre Lukács

Also filed as: LUKACS ISTVAN ENDRE

1 granted patent·86 citations·filing 2004–2004

52Inventor score

Technology areasG01B

Files withHUNGARIAN ACADEMY OF SCIENCES1

Top patents by PatentIndex Score

1 record

0184US7133140B2Apparatus and measurement procedure for the fast, quantitative, non-contact topographic investigation of semiconductor wafers and other mirror like surfacesHUNGARIAN ACADEMY OF SCIENCES·Filed 2004·Granted Nov 7, 2006·86 cites·30 claims

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