Inventor · disambiguated record
Chi-Min Yuan
Also filed as: YUAN CHI-MIN
11 granted patents·214 citations·filing 1993–2017
91Inventor score
Top patents by PatentIndex Score
11 records- 0194US5532089ASimplified fabrication methods for rim phase-shift masksIBM·Filed 1993·Granted Jul 2, 1996·105 cites·16 claims
- 0288US9754966B1Semiconductor on insulator (SOI) block with a guard ringFREESCALE SEMICONDUCTOR INC·Filed 2016·Granted Sep 5, 2017·6 cites·12 claims
- 0382US6783904B2Lithography correction method and deviceFREESCALE SEMICONDUCTOR INC·Filed 2002·Granted Aug 31, 2004·27 cites·18 claims
- 0477US5465859ADual phase and hybrid phase shifting mask fabrication using a surface etch monitoring techniqueIBM·Filed 1994·Granted Nov 14, 1995·30 cites·10 claims
- 0574US9547742B2Systems and methods for via placementFREESCALE SEMICONDUCTOR INC·Filed 2015·Granted Jan 17, 2017·2 cites·19 claims
- 0667US7284231B2Layout modification using multilayer-based constraintsFREESCALE SEMICONDUCTOR INC·Filed 2004·Granted Oct 16, 2007·15 cites·22 claims
- 0761US9009644B1Automatic generation of via definitions based on manufacturabilityFREESCALE SEMICONDUCTOR INC·Filed 2013·Granted Apr 14, 2015·1 cites·8 claims
- 0854US5556726APhotolithographic dose determination by diffraction of latent image gratingIBM·Filed 1995·Granted Sep 17, 1996·12 cites·2 claims
- 0952US10192885B2Semiconductor on insulator (SOI) block with a guard ringNXP USA INC·Filed 2017·Granted Jan 29, 2019·0 cites·19 claims
- 1052US5620818APhotolithographic dose determination by diffraction of latent image gratingIBM·Filed 1996·Granted Apr 15, 1997·10 cites·17 claims
- 1146US5476738APhotolithographic dose determination by diffraction of latent image gratingIBM·Filed 1994·Granted Dec 19, 1995·6 cites·4 claims
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