Inventor · disambiguated record
William J. Adair
Also filed as: ADAIR WILLIAM J · ADAIR WILLIAM JOHN
8 granted patents·508 citations·filing 1993–1999
90Inventor score
Files withIBM8
Top patents by PatentIndex Score
8 records- 0194US5807649ALithographic patterning method and mask set therefor with light field trim maskIBM·Filed 1996·Granted Sep 15, 1998·187 cites·20 claims
- 0294US5532089ASimplified fabrication methods for rim phase-shift masksIBM·Filed 1993·Granted Jul 2, 1996·105 cites·16 claims
- 0389US6184151B1Method for forming cornered images on a substrate and photomask formed therebyIBM·Filed 1999·Granted Feb 6, 2001·92 cites·17 claims
- 0479US6207333B1Mask with attenuating phase-shift and opaque regionsIBM·Filed 1999·Granted Mar 27, 2001·48 cites·22 claims
- 0576US5959325AMethod for forming cornered images on a substrate and photomask formed therebyIBM·Filed 1997·Granted Sep 28, 1999·43 cites·7 claims
- 0651US6027837AMethod for tuning an attenuating phase shift maskIBM·Filed 1999·Granted Feb 22, 2000·11 cites·28 claims
- 0748US5506080ALithographic mask repair and fabrication methodIBM·Filed 1995·Granted Apr 9, 1996·19 cites·13 claims
- 0835US6165651AApparatus for tuning an attenuating phase shift maskIBM·Filed 1999·Granted Dec 26, 2000·3 cites·9 claims
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