Inventor · disambiguated record
Akimichi Yonekura
Also filed as: YONEKURA AKIMICHI
2 granted patents·70 citations·filing 1991–1992
62Inventor score
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2 records- 0174US5316472AVertical boat used for heat treatment of semiconductor wafer and vertical heat treatment apparatusTOKYO ELECTRON LTD·Filed 1992·Granted May 31, 1994·66 cites·24 claims
- 0232US5286523AMethod of processing substrates and substrate processing apparatusTOSHIBA KK·Filed 1991·Granted Feb 15, 1994·4 cites·6 claims
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