Inventor · disambiguated record

Henry Wegert

Also filed as: WEGERT HENRY

1 granted patent·0 citations·filing 2016–2016

6Inventor score

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0139US10146048B2Optical assembly, projection system, metrology system and EUV lithography apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Dec 4, 2018·0 cites·22 claims

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