Inventor · disambiguated record
Jae Hee Sim
Also filed as: SIM JAE HEE
3 granted patents·4 pending applications·1 citations·filing 2015–2021
47Inventor score
Technology areasH10P
Files withSK HYNIX INC7
Top patents by PatentIndex Score
7 records- 0157US9796001B2Apparatus and method for removing particles present on a wafer using photoelectrons and an electric fieldSK HYNIX INC·Filed 2015·Granted Oct 24, 2017·1 cites·14 claims
- 0248US11651968B2Method for forming planarization layer and pattern forming method using the sameSK HYNIX INC·Filed 2020·Granted May 16, 2023·0 cites·17 claims
- 0347US2018120707A1Composition for coating photoresist pattern and method for forming fine pattern using the sameSK HYNIX INC·Filed 2017·Application pending·0 cites
- 0446US2022197139A1Photoresist composition and method of fabricating semiconductor device using the sameSK HYNIX INC·Filed 2021·Application pending·0 cites
- 0544US2017102619A1Composition for coating photoresist pattern and method for forming fine pattern using the sameSK HYNIX INC·Filed 2016·Application pending·0 cites
- 0640US9947546B2Semiconductor integrated circuit device with a surface and method of manufacturing the sameSK HYNIX INC·Filed 2016·Granted Apr 17, 2018·0 cites·17 claims
- 0738US2022068655A1Apparatus and method for planarizing a substrateSK HYNIX INC·Filed 2021·Application pending·0 cites
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