Inventor · disambiguated record
Shyue-Sheng Lu
Also filed as: LU SHYUE SHENG
2 granted patents·1 pending application·10 citations·filing 2001–2004
55Inventor score
Files withTAIWAN SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0156US6866988B2Methods for measuring photoresist dimensionsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 15, 2005·5 cites·20 claims
- 0251US7253112B2Dual damascene processTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 7, 2007·5 cites·20 claims
- 0333US2003044726A1Method for reducing light reflectance in a photolithographic processTAIWAN SEMICONDUCTOR MFG·Filed 2001·Application pending·0 cites
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