Inventor · disambiguated record
Katsuo Komuro
Also filed as: KOMURO KATSUO
3 granted patents·52 citations·filing 2006–2008
68Inventor score
Top patents by PatentIndex Score
3 records- 0194US7824828B2Method and system for improvement of dose correction for particle beam writersCADENCE DESIGN SYSTEMS INC·Filed 2007·Granted Nov 2, 2010·32 cites·47 claims
- 0290US7902528B2Method and system for proximity effect and dose correction for a particle beam writing deviceCADENCE DESIGN SYSTEMS INC·Filed 2006·Granted Mar 8, 2011·20 cites·40 claims
- 0350US7914954B2Stencil, stencil design system and method for cell projection particle beam lithographyD2S INC·Filed 2008·Granted Mar 29, 2011·0 cites·21 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →