Inventor · disambiguated record
Benjamin J. Gitlin
Also filed as: GITLIN BENJAMIN J
3 granted patents·32 citations·filing 2019–2021
71Inventor score
Technology areasH01J
Files withMKS INSTR INC3
Top patents by PatentIndex Score
3 records- 0197US11935726B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2021·Granted Mar 19, 2024·6 cites·31 claims
- 0296US11536755B2System and method for arc detection using a bias RF generator signalMKS INSTR INC·Filed 2020·Granted Dec 27, 2022·13 cites·24 claims
- 0394US11158488B2High speed synchronization of plasma source/bias power deliveryMKS INSTR INC·Filed 2019·Granted Oct 26, 2021·13 cites·36 claims
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