Inventor · disambiguated record

Hyun-Su Kyung

Also filed as: KYUNG HYUN-SU

2 granted patents·48 citations·filing 1995–1995

64Inventor score

Technology areasH10P

Files withNOVELLUS SYSTEMS INC2

Top patents by PatentIndex Score

2 records

0158US5791895AApparatus for thermal treatment of thin film waferNOVELLUS SYSTEMS INC·Filed 1995·Granted Aug 11, 1998·29 cites·15 claims
0246US5778969AApparatus for thermal treatment of thin wafersNOVELLUS SYSTEMS INC·Filed 1995·Granted Jul 14, 1998·19 cites·16 claims

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