Inventor · disambiguated record
Aernout Christiaan Zonnevylle
Also filed as: ZONNEVYLLE AERNOUT · ZONNEVYLLE AERNOUT CHRISTIAAN
7 granted patents·53 citations·filing 2010–2019
82Inventor score
Technology areasH01J
Top patents by PatentIndex Score
7 records- 0194US8294117B2Multiple beam charged particle optical systemKRUIT PIETER·Filed 2010·Granted Oct 23, 2012·27 cites·32 claims
- 0286US9607806B2Charged particle multi-beam apparatus including a manipulator device for manipulation of one or more charged particle beamsZONNEVYLLE AERNOUT CHRISTIAAN·Filed 2012·Granted Mar 28, 2017·13 cites·40 claims
- 0375US10453649B2Apparatus and method for inspecting a sample using a plurality of charged particle beamsUNIV DELFT TECH·Filed 2015·Granted Oct 22, 2019·2 cites·15 claims
- 0474US9378921B2Integrated optical and charged particle inspection apparatusDELMIC B V·Filed 2013·Granted Jun 28, 2016·4 cites·18 claims
- 0574US8895921B2Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatusKRUIT PIETER·Filed 2011·Granted Nov 25, 2014·3 cites·17 claims
- 0672US10903042B2Apparatus and method for inspecting a sample using a plurality of charged particle beamsUNIV DELFT TECH·Filed 2019·Granted Jan 26, 2021·1 cites·20 claims
- 0770US9715992B2Integrated optical and charged particle inspection apparatusDELMIC B V·Filed 2013·Granted Jul 25, 2017·3 cites·17 claims
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