Inventor · disambiguated record
Sai Hung Lam
Also filed as: LAM SAI HUNG
2 granted patents·0 citations·filing 2006–2010
22Inventor score
Top patents by PatentIndex Score
2 records- 0142US7701549B2Method and apparatus to prevent contamination of optical element by resist processingSEMICONDUCTOR MFG INT SHANGHAI·Filed 2006·Granted Apr 20, 2010·0 cites·10 claims
- 0231US9293354B2Apparatus and method for calibrating lithography processLAM SAI HUNG·Filed 2010·Granted Mar 22, 2016·0 cites·19 claims
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