Inventor · disambiguated record

Akihide Shirotori

Also filed as: SHIROTORI Akihide

1 granted patent·0 citations·filing 2013–2013

11Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0145US9543191B2Wiring structure having interlayer insulating film and wiring line without a barrier layer betweenTOKYO ELECTRON LTD·Filed 2013·Granted Jan 10, 2017·0 cites·3 claims

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