Inventor · disambiguated record

Michiel Antal Rogier Stoets

Also filed as: STOETS MICHIEL ANTAL ROGIER

1 granted patent·4 citations·filing 2004–2004

24Inventor score

Technology areasG05B

Files withASML NETHERLANDS BV1

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1 record

0147US7756597B2Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jul 13, 2010·4 cites·20 claims

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