Inventor · disambiguated record
Jacobus Rooda
Also filed as: ROODA JACOBUS E · ROODA JACOBUS EELKMAN
2 granted patents·1 pending application·11 citations·filing 2004–2004
55Inventor score
Technology areasG05B
Files withASML NETHERLANDS BV3
Top patents by PatentIndex Score
3 records- 0155US7184849B2Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer programASML NETHERLANDS BV·Filed 2004·Granted Feb 27, 2007·7 cites·34 claims
- 0247US7756597B2Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer programASML NETHERLANDS BV·Filed 2004·Granted Jul 13, 2010·4 cites·20 claims
- 0335US2005137734A1Method of operating a lithographic apparatus or lithographic processsing cell, lithographic apparatus and lithographic processing cellASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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