Inventor · disambiguated record
Jewoo Han
Also filed as: HAN JEWOO
6 granted patents·1 pending application·0 citations·filing 2019–2024
64Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0169US12211672B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·11 claims
- 0259US11984304B2Apparatus and method for plasma etchingSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 14, 2024·0 cites·17 claims
- 0351US2025176165A1Integrated circuit deviceSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0448US11929239B2Plasma processing apparatus and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 12, 2024·0 cites·18 claims
- 0547US11515193B2Etching apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Nov 29, 2022·0 cites·20 claims
- 0643US11251022B2Gas supply assembly and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Feb 15, 2022·0 cites·17 claims
- 0740US11450545B2Capacitively-coupled plasma substrate processing apparatus including a focus ring and a substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Sep 20, 2022·0 cites·14 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →