Inventor · disambiguated record
Hisanori Matsuo
Also filed as: MATSUO HISANORI
46 granted patents·15 pending applications·726 citations·filing 1998–2024
98Inventor score
Top patents by PatentIndex Score
61 records- 0199US9782870B2Polishing method and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 10, 2017·34 cites·4 claims
- 0297US10035238B2Polishing method and polishing apparatusEBARA CORP·Filed 2017·Granted Jul 31, 2018·15 cites·5 claims
- 0396US9579768B2Method and apparatus for polishing a substrateMOTOSHIMA YASUYUKI·Filed 2012·Granted Feb 28, 2017·31 cites·43 claims
- 0495US10195712B2Polishing method and polishing apparatusEBARA CORP·Filed 2017·Granted Feb 5, 2019·4 cites·8 claims
- 0595US9108292B2Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatusEBARA CORP·Filed 2014·Granted Aug 18, 2015·19 cites·26 claims
- 0695US7040968B2Polishing apparatusEBARA CORP·Filed 2005·Granted May 9, 2006·28 cites·12 claims
- 0793US11926018B2Apparatus for polishing and method of polishingEBARA CORP·Filed 2021·Granted Mar 12, 2024·3 cites·16 claims
- 0893US10259098B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2018·Granted Apr 16, 2019·3 cites·11 claims
- 0993US9156130B2Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatusEBARA CORP·Filed 2014·Granted Oct 13, 2015·11 cites·20 claims
- 1092US10710208B2Polishing method and polishing apparatusEBARA CORP·Filed 2018·Granted Jul 14, 2020·4 cites·9 claims
- 1192US9067296B2Polishing methodONO KATSUTOSHI·Filed 2012·Granted Jun 30, 2015·14 cites·12 claims
- 1290US10414018B2Apparatus and method for regulating surface temperature of polishing padEBARA CORP·Filed 2017·Granted Sep 17, 2019·4 cites·15 claims
- 1390US9969046B2Method and apparatus for polishing a substrateEBARA CORP·Filed 2015·Granted May 15, 2018·3 cites·23 claims
- 1490US6939208B2Polishing apparatusEBARA CORP·Filed 2001·Granted Sep 6, 2005·42 cites·18 claims
- 1588US10369675B2CMP apparatus having polishing pad surface property measuring deviceEBARA CORP·Filed 2016·Granted Aug 6, 2019·3 cites·20 claims
- 1688US8932883B2Method of measuring surface properties of polishing padEBARA CORP·Filed 2013·Granted Jan 13, 2015·9 cites·11 claims
- 1788US6595831B1Method for polishing workpieces using fixed abrasivesEBARA CORP·Filed 2000·Granted Jul 22, 2003·43 cites·24 claims
- 1885US6942548B2Polishing method using an abrading plateEBARA CORP·Filed 2001·Granted Sep 13, 2005·27 cites·20 claims
- 1984US8360817B2Polishing apparatus and polishing methodEBARA CORP·Filed 2010·Granted Jan 29, 2013·7 cites·12 claims
- 2084US6220945B1Polishing apparatusEBARA CORP·Filed 1999·Granted Apr 24, 2001·51 cites·24 claims
- 2181US6672945B1Polishing apparatus and dressing methodEBARA CORP·Filed 2000·Granted Jan 6, 2004·25 cites·18 claims
- 2280US6458012B1Polishing apparatusEBARA CORP·Filed 2000·Granted Oct 1, 2002·18 cites·21 claims
- 2378US6402588B1Polishing apparatusEBARA CORP·Filed 1999·Granted Jun 11, 2002·42 cites·42 claims
- 2478US6390901B1Polishing apparatusEBARA CORP·Filed 1999·Granted May 21, 2002·51 cites·7 claims
- 2577US7207864B2Polishing apparatusEBARA CORP·Filed 2006·Granted Apr 24, 2007·4 cites·12 claims
- 2675US9242339B2Polishing apparatus and polishing methodEBARA CORP·Filed 2014·Granted Jan 26, 2016·4 cites·20 claims
- 2774US6579148B2Polishing apparatusEBARA CORP·Filed 2002·Granted Jun 17, 2003·13 cites·8 claims
- 2874US6190243B1Polishing apparatusEBARA CORP·Filed 1999·Granted Feb 20, 2001·36 cites·17 claims
- 2974US2025058431A1Apparatus for polishing, processing system, and method of polishingEBARA CORP·Filed 2024·Application pending·0 cites
- 3072US6217411B1Polishing apparatusEBARA CORP·Filed 1999·Granted Apr 17, 2001·33 cites·11 claims
- 3171US9393670B2Measuring method of surface roughness of polishing padEBARA CORP·Filed 2014·Granted Jul 19, 2016·2 cites·20 claims
- 3270US6413149B1Abrading plate and polishing method using the sameEBARA CORP·Filed 1999·Granted Jul 2, 2002·31 cites·22 claims
- 3368US6712678B1Polishing-product discharging device and polishing deviceEBARA CORP·Filed 1999·Granted Mar 30, 2004·27 cites·14 claims
- 3468US6336850B1Slurry dispenser and polishing apparatusEBARA CORP·Filed 1998·Granted Jan 8, 2002·28 cites·48 claims
- 3566US6520845B2Polishing apparatusEBARA CORP·Filed 2001·Granted Feb 18, 2003·9 cites·4 claims
- 3664US6398626B1Polishing apparatusEBARA CORP·Filed 2000·Granted Jun 4, 2002·8 cites·25 claims
- 3763US2022347814A1Polishing apparatus and polishing methodEBARA CORP·Filed 2022·Application pending·0 cites
- 3862US6196904B1Polishing apparatusEBARA CORP·Filed 1999·Granted Mar 6, 2001·19 cites·10 claims
- 3961US6626739B1Polishing method and polishing apparatusEBARA CORP·Filed 2000·Granted Sep 30, 2003·7 cites·23 claims
- 4060US12179312B2Apparatus for polishing, processing system, and method of polishingEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·19 claims
- 4160US11897080B2Polishing apparatusEBARA CORP·Filed 2020·Granted Feb 13, 2024·0 cites·13 claims
- 4258US9669515B2Polishing apparatusEBARA CORP·Filed 2015·Granted Jun 6, 2017·1 cites·11 claims
- 4354US10478936B2Method and apparatus for measuring surface properties of polishing padEBARA CORP·Filed 2015·Granted Nov 19, 2019·0 cites·13 claims
- 4450US2024308018A1Substrate processing apparatus and information processing systemEBARA CORP·Filed 2022·Application pending·0 cites
- 4549US6261162B1Polishing apparatus and method of manufacturing grinding plateEBARA CORP·Filed 1999·Granted Jul 17, 2001·11 cites·26 claims
- 4648US6413155B2Polishing apparatusEBARA CORP·Filed 2001·Granted Jul 2, 2002·2 cites·9 claims
- 4748US2023026751A1Polishing apparatus and polishing methodEBARA CORP·Filed 2020·Application pending·0 cites
- 4847US10401285B2Apparatus for measuring surface properties of polishing padEBARA CORP·Filed 2013·Granted Sep 3, 2019·0 cites·12 claims
- 4947US2024075579A1Surface property measuring apparatus for polishing pad, surface property measuring method for polishing pad, and surface property judging method for polishing padEBARA CORP·Filed 2022·Application pending·0 cites
- 5046US2022063050A1Polishing apparatusEBARA CORP·Filed 2019·Application pending·0 cites
Showing the top 50 of 61 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →