Inventor · disambiguated record
Hakaru Mizoguchi
Also filed as: MIZOGUCHI HAKARU
49 granted patents·16 pending applications·945 citations·filing 1984–2022
98Inventor score
Files withGIGAPHOTON INC27KOMATSU MFG CO LTD17MIZOGUCHI HAKARU4ABE TAMOTSU2NATIONAL UNIV CORPORATION NAGAOKA UNIV OF TECHNOLOGY2
Top patents by PatentIndex Score
65 records- 0196US5450436ALaser gas replenishing apparatus and method in excimer laser systemKOMATSU MFG CO LTD·Filed 1993·Granted Sep 12, 1995·123 cites·31 claims
- 0295US9072153B2Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped targetWAKABAYASHI OSAMU·Filed 2012·Granted Jun 30, 2015·16 cites·20 claims
- 0395US8395133B2Apparatus and method of adjusting a laser light source for an EUV source deviceMORIYA MASATO·Filed 2009·Granted Mar 12, 2013·21 cites·27 claims
- 0495US5557629ALaser device having an electrode with auxiliary conductor membersKOMATSU MFG CO LTD·Filed 1992·Granted Sep 17, 1996·94 cites·9 claims
- 0595US5535233ALaser deviceKOMATSU MFG CO LTD·Filed 1993·Granted Jul 9, 1996·99 cites·7 claims
- 0694US9265136B2System and method for generating extreme ultraviolet lightHORI TSUKASA·Filed 2012·Granted Feb 16, 2016·13 cites·17 claims
- 0794US5642374AExcimer laser deviceKOMATSU MFG CO LTD·Filed 1995·Granted Jun 24, 1997·111 cites·19 claims
- 0890US6810061B2Discharge electrode and discharge electrode manufacturing methodKOMATSU MFG CO LTD·Filed 2002·Granted Oct 26, 2004·32 cites·20 claims
- 0987US8785895B2Target supply apparatus, chamber, and extreme ultraviolet light generation apparatusGIGAPHOTON INC·Filed 2013·Granted Jul 22, 2014·7 cites·11 claims
- 1087US5373523AExcimer laser apparatusKOMATSU MFG CO LTD·Filed 1993·Granted Dec 13, 1994·58 cites·20 claims
- 1185US9402297B2Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2015·Granted Jul 26, 2016·3 cites·18 claims
- 1285US7067832B2Extreme ultraviolet light sourceGIGAPHOTON INC·Filed 2003·Granted Jun 27, 2006·33 cites·17 claims
- 1385US6130904AGas supplementation method of excimer laser apparatusKOMATSU MFG CO LTD·Filed 1994·Granted Oct 10, 2000·48 cites·17 claims
- 1485US5754579ALaser gas controller and charging/discharging device for discharge-excited laserKOMATSU MFG CO LTD·Filed 1995·Granted May 19, 1998·69 cites·10 claims
- 1584US8891161B2Optical device, laser apparatus, and extreme ultraviolet light generation systemMIZOGUCHI HAKARU·Filed 2012·Granted Nov 18, 2014·6 cites·5 claims
- 1683US8698114B2Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source deviceGIGAPHOTON INC·Filed 2013·Granted Apr 15, 2014·4 cites·18 claims
- 1783US6839373B1Ultra-narrow band flourine laser apparatusKOMATSU MFG CO LTD·Filed 2000·Granted Jan 4, 2005·24 cites·9 claims
- 1882US10306743B1System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2018·Granted May 28, 2019·1 cites·14 claims
- 1981US9465307B2Cleaning method for EUV light generation apparatusGIGAPHOTON INC·Filed 2013·Granted Oct 11, 2016·3 cites·6 claims
- 2081US8742378B2Target supply unitKAMEDA HIDENOBU·Filed 2012·Granted Jun 3, 2014·4 cites·10 claims
- 2179US10447001B2Laser unitGIGAPHOTON INC·Filed 2017·Granted Oct 15, 2019·2 cites·17 claims
- 2274US8212228B2Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2009·Granted Jul 3, 2012·9 cites·16 claims
- 2374US7984539B2Chamber replacing methodGIGAPHOTON INC·Filed 2007·Granted Jul 26, 2011·3 cites·14 claims
- 2473US12113326B2Laser device and electronic device manufacturing methodGIGAPHOTON INC·Filed 2022·Granted Oct 8, 2024·0 cites·20 claims
- 2573US6008497ALaser appartusKOMATSU MFG CO LTD·Filed 1996·Granted Dec 28, 1999·35 cites·10 claims
- 2671US8507883B2Extreme ultraviolet light source apparatusENDO AKIRA·Filed 2009·Granted Aug 13, 2013·8 cites·19 claims
- 2769US4571730ACross flow type laser devicesKOMATSU MFG CO LTD·Filed 1984·Granted Feb 18, 1986·16 cites·6 claims
- 2868US7078717B2Light source device and exposure equipment using the sameGIGAPHOTON INC·Filed 2004·Granted Jul 18, 2006·11 cites·20 claims
- 2967US6101211ANarrow-band laser apparatusKOMATSU MFG CO LTD·Filed 1996·Granted Aug 8, 2000·31 cites·16 claims
- 3066US10251255B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2018·Granted Apr 2, 2019·0 cites·18 claims
- 3166US9373926B2Laser chamber and discharge excitation gas laser apparatusGIGAPHOTON INC·Filed 2015·Granted Jun 21, 2016·1 cites·16 claims
- 3264US10117317B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2017·Granted Oct 30, 2018·0 cites·20 claims
- 3362US6639929B2Pulse oscillating gas laser deviceGIGAPHOTON INC·Filed 2001·Granted Oct 28, 2003·6 cites·8 claims
- 3460US9877378B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2016·Granted Jan 23, 2018·0 cites·15 claims
- 3559US6819699B1Arf excimer laser device, scanning type exposure device and ultraviolet laser deviceKOMATSU MFG CO LTD·Filed 2000·Granted Nov 16, 2004·5 cites·6 claims
- 3659US5291509AGas laser apparatusKOMATSU MFG CO LTD·Filed 1992·Granted Mar 1, 1994·21 cites·18 claims
- 3759US2019252846A1High-voltage pulse generator and gas laser apparatusNATIONAL UNIV CORPORATION NAGAOKA UNIV OF TECHNOLOGY·Filed 2019·Application pending·0 cites
- 3858US9497842B2System and method for generating extreme ultraviolet lightGIGAPHOTON INC·Filed 2016·Granted Nov 15, 2016·0 cites·20 claims
- 3955US2014328364A1Laser apparatusGIGAPHOTON INC·Filed 2014·Application pending·0 cites
- 4053US2017338618A1High-voltage pulse generator and gas laser apparatusNATIONAL UNIV CORPORATION NAGAOKA UNIV OF TECHNOLOGY·Filed 2017·Application pending·0 cites
- 4152US9362703B2Optical device, laser apparatus, and extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Granted Jun 7, 2016·0 cites·20 claims
- 4251US9507248B2Two-beam interference apparatus and two-beam interference exposure systemGIGAPHOTON INC·Filed 2012·Granted Nov 29, 2016·0 cites·19 claims
- 4350US8813329B2Chamber replacing methodFUJIMOTO JUNICHI·Filed 2011·Granted Aug 26, 2014·0 cites·17 claims
- 4447US4745614ASilent discharge type laser deviceKOMATSU MFG CO LTD·Filed 1986·Granted May 17, 1988·9 cites·4 claims
- 4547US2015102239A1Extreme ultraviolet light generation systemGIGAPHOTON INC·Filed 2014·Application pending·0 cites
- 4646US6337872B1Once through fan for excimer laser apparatusKOMATSU MFG CO LTD·Filed 1999·Granted Jan 8, 2002·13 cites·7 claims
- 4745US8779401B2Target supply unitMIZOGUCHI HAKARU·Filed 2012·Granted Jul 15, 2014·0 cites·12 claims
- 4845US2012228527A1Extreme ultra violet light source apparatusABE TAMOTSU·Filed 2012·Application pending·0 cites
- 4945US2008095209A1Laser device for exposure deviceUSHIO ELECTRIC INC·Filed 2007·Application pending·0 cites
- 5044US9954339B2Laser unit and extreme ultraviolet light generating systemGIGAPHOTON INC·Filed 2016·Granted Apr 24, 2018·0 cites·7 claims
Showing the top 50 of 65 patent records by PatentIndex Score.
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