Inventor · disambiguated record
Kee-Soo Park
Also filed as: PARK KEE SOO
4 granted patents·3 pending applications·22 citations·filing 2005–2023
70Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0192US10196738B2Deposition process monitoring system, and method of controlling deposition process and method of fabricating semiconductor device using the systemSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Feb 5, 2019·11 cites·20 claims
- 0282US7335601B2Method of processing an object and method of controlling processing apparatus to prevent contamination of the objectSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Feb 26, 2008·9 cites·17 claims
- 0371US10541182B2Method of inspecting semiconductor substrate and method of manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Jan 21, 2020·2 cites·17 claims
- 0456US2024019311A1Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0550US2010065215A1Plasma generating apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2009·Application pending·0 cites
- 0643US12283497B2Semiconductor deposition monitoring deviceSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Apr 22, 2025·0 cites·7 claims
- 0740US2020194235A1Apparatus for manufacturing semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2019·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →