Inventor · disambiguated record
Serge Kosche
Also filed as: KOSCHE SERGE
3 granted patents·3 pending applications·4 citations·filing 2008–2024
55Inventor score
Top patents by PatentIndex Score
6 records- 0181US12347650B2Substrate processing system including dual ion filter for downstream plasmaLAM RES CORP·Filed 2024·Granted Jul 1, 2025·0 cites·17 claims
- 0275US9679749B2Gas distribution device with actively cooled gridLAM RES CORP·Filed 2014·Granted Jun 13, 2017·4 cites·35 claims
- 0364US11967486B2Substrate processing system including dual ion filter for downstream plasmaLAM RES CORP·Filed 2020·Granted Apr 23, 2024·0 cites·15 claims
- 0449US2023298859A1Optimizing edge radical flux in a downstream plasma chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 0543US2010120335A1Partial Contact Wafer Retaining Ring ApparatusNOVELLUS SYSTEMS INC·Filed 2008·Application pending·0 cites
- 0636US2019051540A1Systems and methods for plasma-less de-halogenationLAM RES CORP·Filed 2017·Application pending·0 cites
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