Inventor · disambiguated record
Shouichi Uchino
Also filed as: UCHINO SHOUICHI
2 granted patents·5 citations·filing 1988–1991
42Inventor score
Files withHITACHI LTD2
Top patents by PatentIndex Score
2 records- 0153US5290666AMethod of forming a positive photoresist pattern utilizing contrast enhancement overlayer containing trifluoromethanesulfonic, methanesulfonic or trifluoromethaneacetic aromatic diazonium saltHITACHI LTD·Filed 1991·Granted Mar 1, 1994·5 cites·10 claims
- 0225US4983500ARadiation imaging process for formation of contrast enhanced pattern using two photosensitive dialonium salt layers with removal of overlayer and developed resist pattern in underlayerHITACHI LTD·Filed 1988·Granted Jan 8, 1991·0 cites·18 claims
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