Inventor · disambiguated record
Frederik Blumrich
Also filed as: BLUMRICH FREDERIK
3 granted patents·7 citations·filing 2015–2018
62Inventor score
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0184US10670955B2Critical dimension variation correction in extreme ultraviolet lithographyZEISS CARL SMT GMBH·Filed 2018·Granted Jun 2, 2020·3 cites·5 claims
- 0277US10095101B2Critical dimension variation correction in extreme ultraviolet lithographyZEISS CARL SMT GMBH·Filed 2016·Granted Oct 9, 2018·2 cites·12 claims
- 0369US10055833B2Method and system for EUV mask blank buried defect analysisZEISS CARL SMT GMBH·Filed 2015·Granted Aug 21, 2018·2 cites·24 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →