Inventor

LEE YUNG-HSIAO

TW2 patents

Patents

2 patents

US10773953B2Sep 15, 2020

MEMS structure and method of fabricating the same

UNITED MICROELECTRONICS CORP0 citations48

US9790088B2Oct 17, 2017

MEMS structure and method of fabricating the same

UNITED MICROELECTRONICS CORP0 citations48