Inventor · disambiguated record
Leo V. Klos
Also filed as: KLOS JR LEO V · KLOS JR LEO VINCENT · KLOS LEO · KLOS LEO V
14 granted patents·191 citations·filing 1983–2011
92Inventor score
Top patents by PatentIndex Score
14 records- 0190US7138768B2Indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Nov 21, 2006·49 cites·29 claims
- 0290US7102139B2Source arc chamber for ion implanter having repeller electrode mounted to external insulatorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Sep 5, 2006·14 cites·12 claims
- 0388US7491947B2Technique for improving performance and extending lifetime of indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Feb 17, 2009·11 cites·14 claims
- 0476US7276847B2Cathode assembly for indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Oct 2, 2007·14 cites·25 claims
- 0571US6448567B1Method and apparatus for shielding a valve gate and other valve partsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Sep 10, 2002·18 cites·17 claims
- 0670US5629528ACharged particle beam system having beam-defining slit formed by rotating cyclindersVARIAN ASSOCIATES·Filed 1996·Granted May 13, 1997·25 cites·36 claims
- 0768US8455839B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Jun 4, 2013·2 cites·14 claims
- 0868US8071956B2Cleaning of an extraction aperture of an ion sourceCHANEY CRAIG R·Filed 2010·Granted Dec 6, 2011·2 cites·19 claims
- 0967US8049192B2Apparatus and system for controlling ion ribbon beam uniformity in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Nov 1, 2011·1 cites·18 claims
- 1057US6403972B1Methods and apparatus for alignment of ion beam systems using beam current sensorsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 1999·Granted Jun 11, 2002·20 cites·34 claims
- 1153US4744709ALow deflection force sensitive pickVARIAN ASSOCIATES·Filed 1987·Granted May 17, 1988·20 cites·10 claims
- 1252US4931776AFluid flow sensor with flexible vaneVARIAN ASSOCIATES·Filed 1988·Granted Jun 5, 1990·12 cites·4 claims
- 1336US9076625B2Indirectly heated cathode cartridge designCHANEY CRAIG·Filed 2011·Granted Jul 7, 2015·0 cites·19 claims
- 1431US4602713AMultiple wafer holder for a wafer transfer systemVARIAN ASSOCIATES·Filed 1983·Granted Jul 29, 1986·3 cites·5 claims
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