Inventor · disambiguated record
Ser Wee Quek
Also filed as: QUEK SER WEE · QUEK SER WEE SEBASTIAN
6 granted patents·172 citations·filing 1998–2000
86Inventor score
Technology areasB24B
Top patents by PatentIndex Score
6 records- 0183US6325709B1Rounded surface for the pad conditioner using high temperature brazingCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Dec 4, 2001·56 cites·21 claims
- 0280US6245193B1Chemical mechanical polishing apparatus improved substrate carrier head and method of useCHARTERED SEMICONDUCTOR MFG·Filed 2000·Granted Jun 12, 2001·24 cites·10 claims
- 0371US6220936B1In-site roller dresserCHARTERED SEMICONDUCTOR MFG·Filed 1998·Granted Apr 24, 2001·38 cites·36 claims
- 0455US6203408B1Variable pressure plate CMP carrierCHARTERED SEMICONDUCTOR MFG·Filed 1999·Granted Mar 20, 2001·19 cites·17 claims
- 0554US6136710AChemical mechanical polishing apparatus with improved substrate carrier head and method of useCHARTERED SEMICONDUCTOR MFG·Filed 1998·Granted Oct 24, 2000·18 cites·14 claims
- 0649US6155913ADouble polishing headCHARTERED SEMICONDUCTOR MANUF·Filed 1999·Granted Dec 5, 2000·17 cites·40 claims
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