Inventor · disambiguated record

Terutaka Yamaoka

Also filed as: YAMAOKA TERUTAKA

1 granted patent·0 citations·filing 2016–2016

1Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0128US9978619B2Substrate processing apparatus, substrate processing method and storage mediumTOKYO ELECTRON LTD·Filed 2016·Granted May 22, 2018·0 cites·12 claims

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