Inventor · disambiguated record

Robertus Johannes Van Vliet

Also filed as: VAN VLIET ROBERTUS JOHANNES

1 granted patent·8 citations·filing 2005–2005

30Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0181US7170583B2Lithographic apparatus immersion damage controlASML NETHERLANDS BV·Filed 2005·Granted Jan 30, 2007·8 cites·25 claims

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