Inventor · disambiguated record
Katsuo Oshima
Also filed as: OSHIMA KATSUO
4 granted patents·1 pending application·29 citations·filing 2000–2010
73Inventor score
Top patents by PatentIndex Score
5 records- 0167US6455438B1Fabrication method for a semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 2000·Granted Sep 24, 2002·14 cites·12 claims
- 0264US6869738B2Mask pattern correction methodOKI ELECTRIC IND CO LTD·Filed 2002·Granted Mar 22, 2005·9 cites·15 claims
- 0355US7629223B2Method for manufacturing semiconductor deviceOKI SEMICONDUCTOR CO LTD·Filed 2008·Granted Dec 8, 2009·1 cites·12 claims
- 0452US6838643B2Method and apparatus for performing baking treatment to semiconductor waferOKI ELECTRIC IND CO LTD·Filed 2002·Granted Jan 4, 2005·5 cites·18 claims
- 0523US2010304311A1Method of producing resist patternOSHIMA KATSUO·Filed 2010·Application pending·0 cites
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