Inventor · disambiguated record

Chunghowan Kim

Also filed as: KIM CHUNGHOWAN

1 granted patent·0 citations·filing 2015–2015

5Inventor score

Technology areasH10P

Files withSAMSUNG ELECTRONICS CO LTD1

Top patents by PatentIndex Score

1 record

0126US9397013B2Method of controlling an etching process for forming fine patterns of a semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jul 19, 2016·0 cites·15 claims

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