Inventor · disambiguated record
Cornelis Petrus Luijkx
Also filed as: LUIJKX CORNELIS PETRUS ANDREAS
2 granted patents·81 citations·filing 2003–2004
67Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0192US7307263B2Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trapASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·50 cites·34 claims
- 0285US7030958B2Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 18, 2006·31 cites·47 claims
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