Inventor · disambiguated record
Shozo Hosoda
Also filed as: HOSODA SHOZO
5 granted patents·702 citations·filing 1986–1997
87Inventor score
Top patents by PatentIndex Score
5 records- 0195US6110287APlasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 1997·Granted Aug 29, 2000·397 cites·2 claims
- 0292US5779803APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Jul 14, 1998·83 cites·13 claims
- 0389US5611655AVacuum process apparatus and vacuum processing methodTOKYO ELECTRON LTD·Filed 1996·Granted Mar 18, 1997·143 cites·13 claims
- 0478US5578164APlasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 1994·Granted Nov 26, 1996·30 cites·10 claims
- 0574US4782037AProcess of fabricating a semiconductor insulated circuit device having a phosphosilicate glass insulating filmHITACHI LTD·Filed 1986·Granted Nov 1, 1988·49 cites·49 claims
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