Inventor · disambiguated record

Ferdinand Füller

Also filed as: FÜLLER FERDINAND

1 granted patent·0 citations·filing 2010–2010

6Inventor score

Technology areasH01J

Files withMAHNKE GUIDO1

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1 record

0122US8980071B2Apparatus and method for detecting a state of a deposition apparatusMAHNKE GUIDO·Filed 2010·Granted Mar 17, 2015·0 cites·11 claims

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