Inventor · disambiguated record
James R. Oikari
Also filed as: OIKARI JAMES R
3 granted patents·1 pending application·82 citations·filing 1997–2003
74Inventor score
Technology areasH10P
Files withFSI INT INC3
Top patents by PatentIndex Score
4 records- 0181US7364625B2Rinsing processes and equipmentFSI INT INC·Filed 2002·Granted Apr 29, 2008·31 cites·10 claims
- 0269US5861064AProcess for enhanced photoresist removal in conjunction with various methods and chemistriesFSI INT INC·Filed 1997·Granted Jan 19, 1999·40 cites·21 claims
- 0338US6037271ALow haze wafer treatment processFSI INT INC·Filed 1998·Granted Mar 14, 2000·11 cites·15 claims
- 0434US2005000549A1Wafer processing using gaseous antistatic agent during drying phase to control charge build-upFiled 2003·Application pending·0 cites
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