Inventor · disambiguated record

Steffen Lauer

Also filed as: LAUER STEFFEN

1 granted patent·6 citations·filing 2006–2006

27Inventor score

Technology areasG03F

Files withZEISS CARL SMT AG1

Top patents by PatentIndex Score

1 record

0177US7230220B2Method of determining optical properties and projection exposure system comprising a wavefront detection systemZEISS CARL SMT AG·Filed 2006·Granted Jun 12, 2007·6 cites·26 claims

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