Inventor · disambiguated record

Yanfen Xiao

Also filed as: XIAO YANFEN

1 granted patent·0 citations·filing 2013–2013

1Inventor score

Technology areasG02B

Files withSHANGHAI INST OPTICS & FINE ME1

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1 record

0138US9323052B2Lithography pupil shaping optical system and method for generating off-axis illumination modeSHANGHAI INST OPTICS & FINE ME·Filed 2013·Granted Apr 26, 2016·0 cites·2 claims

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