Inventor · disambiguated record
Hidehito Soeta
Also filed as: SOETA HIDEHITO
1 granted patent·2 pending applications·0 citations·filing 2010–2017
14Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0151US11037762B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Jun 15, 2021·0 cites·15 claims
- 0248US2013340937A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0341US2010243609A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →